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MCL x25 Wafer Transfer Machine

Description
    • The MacLite Junior Series will transfer a maximum of 25 wafers between two cassettes, two process boats or one process boat and one cassette.
    • As with all Mactronix wafer transfer systems, the MacLite Series may be configured to accommodate a wide range of Plastic, Teflon®, Metal, Quartz, Silicon Carbide, and Polysilicon carriers.
    • Fast & Smooth, featuring ramped speeds. A 25 wafer transfer is under 40 seconds.
    • Operator interface is with a 12 key keypad with a 4 line LCD display.
    • MacLite machines are totally electronic, with an auto switching power supply, 110 Vac 60 Hz or 240 Vac 50/60 Hz.
    • The machine will not introduce more than 1.5 particles, greater than .23 micron in diameter, per wafer per transfer (machine must be exhausted to achieve this figure).
    • Single Board PC controlled.
    • Sensors detect wafers and cassette or process carrier presence for safety.
    • Flat alignment is maintained during transfer.
    • Machine will not drop wafers in the event of a power failure and will prompt the operator through the Recovery Mode after power has been restored.
    • All exposed aluminum parts are hard Black Anodized.
    • Covers are powder covered aircraft grade aluminum.
    • A “Technician Mode” is provided to facilitate preventative maintenance.