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Bright Field Wafer Inspection System

  • AIS-x00

    The Automatic Wafer Inspector (AIS) machine presents wafers for light box inspection with the option for rejected wafers to be placed in lower 25-slot cassette.

    • User friendly, menu driven programming for operator and maintenance mode provides complete flexibility.
    • Unloading may be accomplished through keypad commands and may be pre-programmed for customized sequences.
    • Joystick for Tilt/Rotate.
    • Wafers are memory mapped and monitored while in the cassettes and are vacuum sensed and monitored during robotic transfers to inhibit accidental damage.
    • Specific flat orientation is achieved by one of four programmed positions.
    • The machine has a small footprint and is exhaust ported for clean room operation.
    • Elevator platform indexes for easy loading and unloading of wafers.
    • Wafer tilted 65 degrees under “Light Cube” for 1x visual inspection.
    • Light box enclosed on three sides for optimal inspection.
    • Machine construction is from Mactronix standard anticorrosion package (all aluminum parts are black hard anodized).